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Domestic companies break through lithography technology

發(fā)布時(shí)間:2021-10-22

    Domestic companies have made breakthroughs in lithography technology and promoted the development of miniaturization, high-precision, and development of products.
    When the crystal has stable hardness and physical and chemical properties, its frequency basically does not change with temperature, and the resulting internal oscillation loss is also minimal, so it is very suitable for precision manufacturing. At the same time, different from the traditional mechanical processing production method, the improved process is more convenient for mass production. While ensuring the miniaturization, the deviation can be controlled to a minimum, so that the product has miniaturization, low power consumption, and high stability. The advantages of high frequency. The difference between miniaturized products using QMEMS technology and the front-end technology of crystal oscillators produced by traditional machining is:

    1) The cutting step of miniaturized products is not to cut into a single tuning fork crystal unit at a time, but first to cut into a large wafer that can collect thousands of wafer units;

    2) The tuning fork wafer and electrode formation process adopts double-sided lithography. The integrated processing of lithography, metal vapor deposition, laser frequency modulation, etc. is performed on WAFER, and the size of a single tuning fork unit is extremely small.

      Domestic companies have made breakthroughs in lithography technology. Based on laser frequency modulation and lithography technology, the application of MEMS technology in crystal resonator products has been strengthened. At present, the company has obtained research results on the core technology of producing microcrystalline resonators, and has successfully assembled more than 3,000 "1610" crystal resonators on a 3-inch WAFER using double-sided photolithography.

      Driven by downstream applications, the crystal oscillator market is picking up.

      The global demand for crystal oscillators is increasing year by year.

      At present, the international status of China's electronic information industry is steadily improving. According to the "Statistical Yearbook of China's Electronic Information Industry", in 2018, the sales revenue of China's electronic information industry was 1,69027 trillion yuan, of which the electronics manufacturing industry's revenue reached 10,59.6 billion yuan, the export value was 5,893.1 billion yuan, and the import value was 4,189.8 billion yuan. Export) 8893.3 billion yuan. Although the global trade situation in 2018 is complex and the consumer electronics market is weak, China's electronic information manufacturing industry has embarked on a high-quality development path through structural adjustments, transformation and upgrading, and the main business revenue of China's electronic information manufacturing industry above designated size has continued to grow against the trend by 9.0 %.

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